We offer complete refurbishment and support for the LAM 2300 Versys Kiyo 45, a high-density plasma etch system designed for advanced patterning applications. 

Known for its precise anisotropic etching, excellent critical dimension (CD) control, and high aspect ratio capability, the Kiyo 45 is ideal for critical etch steps in leading-edge semiconductor nodes. 

Its advanced plasma source technology and process flexibility make it a reliable solution for maintaining high yield and pattern fidelity in demanding production environments. 

Our services restore full tool performance with enhanced reliability and process consistency.

• Supported Applications: Precision-matched for high-selectivity conductor and silicon etch applications on production-proven 300mm lines.

• Operational Reliability: Engineered to protect tool maturity, maximizing MTBF through strict mechanical and plasma uniformity calibrations.

• Consumables & Parts Ecosystem: Full sourcing for specialized conductor etch consumables, chamber liners, and high-durability seals to minimize tool downtime.