We provide expert mechanical overhaul, component-level sourcing, and dynamic teaching profiles for Tokyo Electron (TEL) wafer handling arms integrated within track systems and etching clusters. To ensure operational maturity on active lines, our engineering team manages complete refurbishment profiles that restore the structural repeatability of the arm links without requiring full assembly replacement from the OEM.
By checking link kinematics and levelling geometries, our technicians eliminate edge-grip anomalies and structural slide errors that cause wafer breakage. All serviced TEL modules undergo intensive static and dynamic calibration routines to protect your runtime stability, maximise Mean Time Between Failures (MTBF), and safely minimise your fab’s Cost of Ownership (CoO).
Wafer Transfer Robot
Model: TELAlpha-303i, TELINDY, TELINDY-PLUS
Robot: Alpha-303i TEL Wafer Transfer, KHI Wafer Transfer
Service: Overhaul & Installation
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