Semiconductor Quartz Components & Fabricated Parts

High-purity fabricated quartzware categorised by front-end process nodes.

Diffusion

Process Tube, Outer Tube, Inner Tube, Boat, Ring Boat, Pedestal, Fin, Torch Chamber, Injector, Shutter, Bell Jar

Epitaxy

Golden Chamber, Quartz Chamber, Dome, Linear, Shaft, Insert, Baffle

Wet

SC2 Tank, SPM Tank, QDR Tank, Lifter, Guide, Chuck, Cassette

Etch

Quartz Disk, Gas Injector, TCP Window, OES Window, Edge Ring, Cover Ring, Shadow Ring

Thin Film

Quartz Plate, Supporting Disc, Barrier, Ceiling, Diffusion Pin, Locking Piston

Specialised Quartzware for Front-End Processes

Global TechSolutions (GTS) provides high-purity, fabricated quartz components engineered specifically to meet the strict contamination controls and thermal demands of advanced wafer fabrication.

Diffusion & Oxidation: High-temperature furnace tubes, liner tubes, pedestals, and vertical/horizontal quartz boats.
Epitaxy & Thin Film (CVD): Reactor chamber components, injectors, and showerheads optimized for process stability.
Etch & Wet Cleans: Corrosion-resistant quartz rings, focus rings, and bath vessels designed to endure aggressive plasma and chemical environments.

Through our strategic partnerships with premium raw material suppliers like Momentive, Heraeus, Tosoh, and Pacific Quartz, we ensure exceptional component reliability and material maturity for every batch.