We provide refurbishment and technical support for the LAM 2300 Exelan Flex 45, a high-performance plasma etch system designed for advanced dielectric etch applications. 

Part of the LAM 2300 series, the Exelan Flex 45 features high-density plasma technology, enabling precise, anisotropic etching with excellent selectivity and profile control. 

Optimised for low-k dielectrics and high-aspect-ratio features, this system supports 300mm wafer processing in high-volume fabs. 

We restore tools fully, keeping performance, reliability, and yield consistent for demanding semiconductor manufacturing applications.

• Supported Applications: Optimised for high-confinement dielectric etch applications, including high-aspect-ratio contacts and via holes.

• Operational Reliability: Refurbished to maintain strict plasma stability, optimising critical dimension (CD) uniformity across mature 300mm nodes.

• Consumables & Parts Ecosystem: Fast access to replacement edge rings, dielectric gas showerheads, and RF matching network parts to lower cost-of-ownership.