We offer refurbishment, technical support, and high-purity consumable management for the Kokusai Quixace 2, providing a mature, cost-effective alternative to high-premium OEM replacements. This high-efficiency vertical thermal processing system is engineered for advanced CVD, diffusion, and LPCVD oxidation/annealing applications.

Restored to ensure excellent film uniformity, process repeatability, and low defectivity, its high-throughput design supports 300mm wafer production with stable temperature control. This is a reliable choice for protecting yield across FEOL, without the need for extensive OEM lead times.

• Supported Applications: Designed for advanced batch thermal processing, supporting stable Oxidation, Diffusion, and LPCVD films on 300mm platforms.

• Operational Reliability: Restored to original engineering tolerances to protect yield stability, ensure thermal uniformity, and enhance long-term tool maturity.

• Consumables & Parts Ecosystem: Seamless access to replacement high-purity quartzware, process tubes, and heating elements engineered to minimise fab downtime.