We offer refurbishment and support for the KLA SP1/SP2, industry-standard tools for optical surface inspection in semiconductor manufacturing. 

These systems provide high-sensitivity particle and defect detection across 300mm wafers, using advanced darkfield and brightfield imaging techniques. Ideal for front-end process monitoring, the SP1/SP2 helps identify yield-limiting defects early in the production flow. 

• Supported Applications: Industry-standard laser-based surface inspection for detecting unpatterned wafer defects, particles, and surface roughness.

• Operational Reliability: Optical paths, lasers, and collection channels are fully calibrated to original factory sensitivities to protect defect capture accuracy.

• Consumables & Parts Ecosystem: Direct support for replacement laser modules, photomultiplier tubes (PMT), power supplies, and chuck assemblies