We provide refurbishment and servicing for the Hitachi CG4000 / 9380, a high-precision Critical Dimension Scanning Electron Microscope (CD-SEM) used in advanced semiconductor manufacturing.

Designed for inline metrology, this system delivers nanometer-level accuracy in measuring feature dimensions across 300mm wafers.

Ideal for process control during lithography and etch steps, the CG series supports high-resolution imaging, automated pattern recognition, and critical dimension monitoring, ensuring tight process control and high-yield production

• Supported Applications: Critical Dimension SEM (CD-SEM) optimized for highly precise, non-destructive inline metrology and linewidth measurements.

• Operational Reliability: Fine-tuned electron optics and stage mechanics to maintain high-resolution imaging consistency and exceptional yield tracking.

• Consumables & Parts Ecosystem: Sourcing for critical electron gun components, vacuum valves, and specialized electronic boards to maximize tool uptime.