We provide expert refurbishment services for the AMAT SEMVision G3/G4, a high-resolution e-beam defect review system used in advanced process control.

Designed for 300mm wafer manufacturing, the SEMVision provides high‑resolution imaging for complex wafer structures, including 3D devices and high‑aspect‑ratio features. The system combines automated defect review with intelligent defect classification, enabling faster root-cause analysis, improved process monitoring, and higher production yield.

Ideal for both FEOL and BEOL process monitoring, it enables root-cause analysis and yield improvement by bridging optical inspection with electron-beam level detail.

• Supported Applications: High-throughput defect review and automatic defect classification (ADC) for rapid root-cause analysis on the fab floor.

• Operational Reliability: Fully refurbished alignment systems and imaging columns to ensure highly repeatable capture rates and stable classification metrics.

• Consumables & Parts Ecosystem: Reliable replacement parts for column assemblies, ultra-high vacuum components, and precision stage components.